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Latest-generation Computational Design Platform more than doubles processing speed and enables the first inline dose correction in multi-beam mask writers.

GPU Based Lithography Simulation and OPC

Publication • February 1, 2014

University of Massachusetts Amherst Masters Thesis by Lokesh Subramay
TrueMask® MDP is the First and Only Model‐Based Mask Data Preparation Solution   to Process Full‐Chip Design Data for Production Applications