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Page 4
Semiconductor Engineering: Mask Complexity, Cost and Change – eBeam Initiative Roundtable
News • May 22, 2025
Experts at the Table: Harry Levinson, principal lithographer at HJL Lithography; Aki Fujimura, CEO of D
2
S; Ezequiel Russell, senior director of mask technology at Micron; and Christopher Progler, executive vice president and CTO at Photronics
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Photomask Japan: Micron, NuFlare, and D
2
S Named in Best Paper Awards at PMJ 2025
News • May 20, 2025
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Three Ways to Improve Wafer Uniformity
News • April 21, 2025
Presented by Aki Fujimura, D
2
S at PMJ 2025 [April 18, 2025]
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Semiconductor Engineering: Three Ways Curvy ILT Together With PLDC Improves Wafer Uniformity
News • April 15, 2025
D
2
S CEO Aki Fujimura's second blog in the series explains how improving mask manufacturing is the simplest way to reduce wafer variation.
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SPIE AL: Pixel-Level Dose Correction (PLDC): Improving Uniformity and Linearity of Manhattan and Curvilinear Masks in 0 TAT
News • February 25, 2025
Presented by D
2
S CEO Aki Fujimura at eBeam Initiative luncheon at SPIE AL.
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Semiconductor Engineering: Improving Uniformity and Linearity for All Masks
News • January 29, 2025
Pixel-level dose correction improves the quality of masks written by multi-beam. Blog by D
2
S CEO Aki Fujimura.
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