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Experts at the Table: Harry Levinson, principal lithographer at HJL Lithography; Aki Fujimura, CEO of D2S; Ezequiel Russell, senior director of mask technology at Micron; and Christopher Progler, executive vice president and CTO at Photronics
Presented by Aki Fujimura, D2S at PMJ 2025 [April 18, 2025]
D2S CEO Aki Fujimura's second blog in the series explains how improving mask manufacturing is the simplest way to reduce wafer variation.
Presented by D2S CEO Aki Fujimura at eBeam Initiative luncheon at SPIE AL.
Pixel-level dose correction improves the quality of masks written by multi-beam. Blog by D2S CEO Aki Fujimura.